CLEANROOM ELECTROSTATIC MANAGEMENT


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CLEANROOM ELECTROSTATIC MANAGEMENT
CLEANROOM ELECTROSTATIC MANAGEMENT
General Principles A variety of methods have been developed to deal with static charge. The basic methods are grounding facility components (walls, floors, workbenches, and equipment), appropriate use of conductive and static-dissipative materials, and employing local or room ionization to control static charge on insulators. In addition to these basic methods, education of cleanroom personnel in the practice of static control and auditing for compliance with the static control program are essential for the program's success. Modern cleanroom environments make extensive use of grounding with conductive and static dissipative materials in …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CLEANROOM ELECTROSTATIC MANAGEMENT, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export