ELECTROSTATIC CHARGE IN SEMICONDUCTOR CLEANROOMS


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ELECTROSTATIC CHARGE IN SEMICONDUCTOR CLEANROOMS
ELECTROSTATIC CHARGE IN SEMICONDUCTOR CLEANROOMSElectrostatic charge grows to extremely high levels in the environment of a semiconductor fab. This effect is called triboelectrification is a surface phenomenon and is caused by contact and separation of two different materials. The presence of water absorbed into the surface of the material from the humidity in the air diminishes the effect.1,2Many of the items in the cleanroom are constructed from plastics, which, in general, are extremely good insulators. Because it is necessary to employ these materials since the…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ELECTROSTATIC CHARGE IN SEMICONDUCTOR CLEANROOMS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export