APPENDIX: ABBREVIATIONS FOR REFERENCED SAMPLING DEVICES AND ANALYSIS METHODS


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APPENDIX: ABBREVIATIONS FOR REFERENCED SAMPLING DEVICES AND ANALYSIS METHODS
APPENDIX: ABBREVIATIONS FOR REFERENCED SAMPLING DEVICES AND ANALYSIS METHODS AA = atomic absorption spectroscopy AA-F = atomic absorption spectroscopy—flame AA-GF = atomic absorption spectroscopy—graphite furnace AES = atomic emission spectroscopy API-MS = atmospheric pressure ionization—mass spectroscopy CL = chemiluminescence CLS = chemiluminescence monitoring system
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. APPENDIX: ABBREVIATIONS FOR REFERENCED SAMPLING DEVICES AND ANALYSIS METHODS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export