FINAL CONSIDERATIONS


Please sign in to view the rest of this entry.

FINAL CONSIDERATIONS
FINAL CONSIDERATIONSAMC control has become an essential design requirement for all new semiconductor manufacturing facilities, as well as for a large number of existing facilities. Subsequently, chemical filtration in many forms is being used in makeup and recirculation air handlers, fan filter units, minienvironments, and process tools.Given the proper attention, one can successfully specify and implement an effective and economical AMC control solution for most applications. One cannot, however, go in with preconceived notions about how a particular system will perform under a given set of conditions, rather, one should determine what they ultimately want to achieve by the installation of such a system.The following six points s…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FINAL CONSIDERATIONS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export