SPECIFYING AN AMC CONTROL SYSTEM


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SPECIFYING AN AMC CONTROL SYSTEM
SPECIFYING AN AMC CONTROL SYSTEMAs manufacturers have become much more sophisticated in their knowledge and understanding of AMC and its effects in the cleanroom. They have also developed a better general understanding of where AMC control should be applied and why. As their knowledge of AMC-related problems have increased, so too have their expectations for an AMC control system.Some manufacturers' concerns about the proper selection of an AMC control system have become so acute that it is being reflected in their control specifications. One manufacturer may call for a minimum of 90 percent removal of target contaminants, while another will set AMC control limits at 1 ppb or less. Still another may require that the system must last a minimum of one y…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. SPECIFYING AN AMC CONTROL SYSTEM, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export