AMC CONTROL SPECIFICATIONS AND STANDARDS


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AMC CONTROL SPECIFICATIONS AND STANDARDS
AMC CONTROL SPECIFICATIONS AND STANDARDSAMC control specifications are often based upon individual chemical species or groups of chemical contaminants (acids, bases, chlorides, VOCs). This is not surprising as many of these were developed from an "industry-wide" perspective. Individual semiconductor manufacturers and/or equipment suppliers, due to intellectual property issues and competitive pressures, tend to use their own contamination control criteria that have been developed through their own experience, capabilities, and expectations. There is no general consensus on what may be considered acceptable levels of airborne chemical contamination, but the ranges have been narrowing over the last 20 years and this trend is expected to continue through successive device gene…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. AMC CONTROL SPECIFICATIONS AND STANDARDS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export