AMC CONTROL APPLICATION AREAS


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AMC CONTROL APPLICATION AREAS
AMC CONTROL APPLICATION AREAS
HVAC System Designs Most air handlers employed in semiconductor cleanrooms are large custom units moving tremendous quantities of air used for both pressurization and recirculation. A typical cleanroom HVAC system might consist of makeup air handlers (MAUs) for pressurization air, recirculating air handling units (RAUs), or fan filter units (FFUs) to move the supply air to the cleanroom, ducts to route the air, plenums to distribute the air, and filtration systems to clean the air before it is introduced to the cleanroom. Whichever type of air handling system is employed in a semiconductor fab, there are a number of locations in which chemical fi…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. AMC CONTROL APPLICATION AREAS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export