AMC MONITORING


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AMC MONITORING
AMC MONITORINGJust as there are many ways to apply chemical filtration for the control of AMC, there are many different methods being used to measure AMC inside and outside the cleanroom environment and to evaluate the filter-system performance. Once an AMC control strategy has been decided upon and implemented, whether it involves the use of chemical filtration or not, one must be able to monitor the success or failure of meeting specified AMC control criteria. As a minimum any AMC monitoring program must provide the following: Type(s) of contaminants present and their relative levels Ambient air quality correlated to specific air purity classifications
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. AMC MONITORING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export