CHEMICAL FILTRATION EQUIPMENT DESIGNS


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CHEMICAL FILTRATION EQUIPMENT DESIGNS
CHEMICAL FILTRATION EQUIPMENT DESIGNS
Chemical Filters Chemical filters used in AMC control applications are available in a wide variety of commercial designs, usually as packed-bed media filters where a dry, granular, or pelletized media is filled in the space between perforated metal or plastic screens. Others incorporate pleated filters and media panels of the types described in Sec. 40.6. The filter types most commonly used in cleanroom HVAC systems include Serpentine. These contain t…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CHEMICAL FILTRATION EQUIPMENT DESIGNS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export