GAS-PHASE AIR FILTRATION PRINCIPLES


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GAS-PHASE AIR FILTRATION PRINCIPLES
GAS-PHASE AIR FILTRATION PRINCIPLESGas-phase (chemical) air filtration, as applied in mechanical ventilation systems, uses two main mechanisms to remove airborne gaseous contaminants. One, which is a reversible physical process, is known as adsorption, and is typically used for removal of nonpolar organic contaminants and those with higher molecular weights (MW > 80). The other, which involves adsorption and irreversible chemical reaction(s), is termed chemisorption, and is used to control reactive chemicals such as acids and bases, as well as other compounds such as hydrides. Before chemical filtration media or equipment are discussed, it is appropriate to present a brief overview of gas-phase air filtration …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. GAS-PHASE AIR FILTRATION PRINCIPLES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export