IMPLEMENTING AMC CONTROL


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IMPLEMENTING AMC CONTROL
IMPLEMENTING AMC CONTROL
Three-Step Methodology for Optimum Control of AMC AMC control has now become fully integrated into the cleanroom environmental management requirements of high-tech manufacturing facilities. The optimum control of AMC involves three steps: Assessment of the air quality both outside and inside the facility to identify target contaminants as well as those that could affect the performance of the AMC control system Selection and qualification of an AMC control system
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. IMPLEMENTING AMC CONTROL, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export