AMC CONTROL CONSIDERATIONS


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AMC CONTROL CONSIDERATIONS
AMC CONTROL CONSIDERATIONSAlthough there will be differences in how AMC control will be applied, there are general guidelines that can be considered. Whenever possible fab locations should be selected that are not near point or mobile AMC and particulate sources, and not in highly polluted urban areas, near sewer plants, dumps/landfills, chemical plants, oil refining, heavy industry, etc.Low emitting materials need to be used for critical environments and there are guidelines for characterizing outgassed organic compounds from cleanroom materials and components. Recommended practice IEST-RP-CC031.34 describes a test method appropriate for semiquantitative de…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. AMC CONTROL CONSIDERATIONS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export