CLASSIFICATION OF AMC


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CLASSIFICATION OF AMC
CLASSIFICATION OF AMCThe first consideration in the selection of an AMC control system should be an assessment for the type and quantities of AMC to be controlled. This can be done by direct gas monitoring or with semiquantitative techniques using passive or real-time monitors.1,2 There can be dozens of contaminants present in a makeup or recirculation airstream, but there may only be relatively few that require close control. Contaminant classifications can help to group similar contaminant types, such as those with sources inside the fab (Table 40…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CLASSIFICATION OF AMC, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export