INTRODUCTION TO CHEMICAL CONTAMINATION AND DEFINITION OF AMC


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INTRODUCTION TO CHEMICAL CONTAMINATION AND DEFINITION OF AMC
INTRODUCTION TO CHEMICAL CONTAMINATION AND DEFINITION OF AMCContamination control in the microelectronics industry still has a primary focus on the removal of airborne particulate matter. However, when the effects of airborne molecular contamination (AMC) came to the forefront with full-scale production of 0.25 μm (250 nm) semiconductor devices in the late 1990s, AMC control focused on applications such pregate oxidation storage environments, salicidation and contact formation processes, and DUV lithography environments. Wafers were still being exposed to the ambient cleanroom environment, where AMC sources both outside and inside the cleanroom presented challenges for their control.As we moved from micrometers to nanometers t…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION TO CHEMICAL CONTAMINATION AND DEFINITION OF AMC, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export