REFERENCES


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REFERENCES
REFERENCES Yuan Taur and Tak H. Ning, Fundamentals of Modern VLSI Devices, Cambridge University Press, Cambridge, U.K., 1998. L. F. Fuller, "IEEE/SEMI 1990 Advanced Semiconductor Manufacturing Conference and Workshop," pp. 108–111, 1990. J. R. Moyne, R. Telfeyan, A. Hunvitz, and J. Taylor, "A Process-Independent Run-to-Run Controller and Its Application to Chemical-Mechanical Planarization," Advanced Semiconductor Manufacturing Conference and Workshop, ASMC 95 Proceedings. IEEE/SEMI, pp. 194–200, Cambridge, MA,1995.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export