VIRTUAL METROLOGY


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VIRTUAL METROLOGY
VIRTUAL METROLOGYWith virtual metrology (VM), we take the extraction of relevant data from tool parameters one step further. Instead of measuring a product after processing, we estimate a critical feature by analyzing the known information about incoming wafers and the data collected during processing. An obvious advantage to this approach is that it eliminates the need for measurement, saving time, and money. We also get information on all wafers, instead of just the ones sampled for measurement.To accurately model the physical features of the wafer after processing, we have to understand the impact of tool parameters on the product. By running a DOE (Design of Experiments) on, for example, an etch tool, we can find the sensitivity of the etch process to all available…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. VIRTUAL METROLOGY, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export