INTRODUCTION


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INTRODUCTION
INTRODUCTIONIn the modern semiconductor manufacturing environment we routinely create wafers with millions or billions of individual components, mostly transistors, and we expect each of them to perform within rigorously defined specifications. The construction of these components depends on the execution of hundreds or thousands of process steps of various nature. We will be successful only if each of the steps on all these components is performed within very strict physical parameters. The tools of a modern fab are built to meet these demands, but by the nature of the industry, to make every new technology node exceed the previous one by a significant margin, we often require that tools operate at the limits of accuracy and reproducibility.To enhance our capability to con…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export