FURTHER READING


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FURTHER READING
FURTHER READING A Reference Model for Computer Integrated Manufacturing (CIM) Purdue Research Foundation, 1989. ANSI/ISA-95 standards and ISA-95 related publications: https://www.isa.org/store/products/?mstype=Publications&ms_product_type=Standards&mssearch=ISA-95.#/129a379272a3a4005515092db8d1a58b. "Enterprise-Control System Integration Part 1: Models and Terminology," Research Triangle Park, North Carolina, USA: International Society of Automation. 2000. ISBN 1556177275.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FURTHER READING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export