FUTURE TRENDS


Please sign in to view the rest of this entry.

FUTURE TRENDS
FUTURE TRENDSIn the semiconductor industry CIM and factory automation were first used as a means to improve operator efficiency and to optimize factory output. In today's fabs while human intervention is still required to support error handling, complex decision making, as well as to manually correct equipment failures, the trend is for the CIM and factory automation systems to address each of these human-based operations automatically.Error handling and complex decision making are frequently required in a fab due to the fact that the process flow is complex (many hundreds of steps), is reentrant (certain tools are used multiple times to process a wafer), is constantly changing (process recipes are frequently adjusted to improve yield and performance), and must be robust…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FUTURE TRENDS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export