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OPERATIONAL CONSIDERATIONSWith the multibillion dollar cost of 300-mm factories and the AMHS increasingly being recognized as a mission critical application, several key operational considerations must be made in the evaluation and selection of an AMHS. At a macro level, fabs must select an AMHS that meets their performance requirements while minimizing the overall cost of ownership of the system.
Performance Requirements The International Technology Roadmap for Semiconductors (ITRS) highlights the roadmap for key performance criteria for AMHS (
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. OPERATIONAL CONSIDERATIONS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export