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SEMICONDUCTOR AMHSAn AMHS is utilized to transport and store carriers within a semiconductor factory. There are a variety of carriers as well as AMHS components utilized in the semiconductor industry, which each has particular usage characteristics. The AMHS components can broadly be defined by two categories: the storage system and the transport system.
Wafer Carriers As wafer sizes have evolved over the last few decades from 3 in or smaller wafers to state-of-the-art 300-mm wafers, the carriers that contain them have also changed. With the advent of 200-mm semiconductor production in the early 1990s, a significant emphasis was placed on designing carriers that could be automatically mov…
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. SEMICONDUCTOR AMHS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export