SOFTWARE


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SOFTWARE
SOFTWARE
MES, SPC, and APC Software The central piece of software in a manufacturing line is the manufacturing execution system (MES). This software is used for tracking which lots are currently being processed on what manufacturing tool, dispatching lots to the next available equipment, and providing the correct process recipe for the equipment. The MES software thus has a huge database that not only tracks which lot is currently at what stage in the process flow and on what tool it is being processed, it also contains the process flows for each product and the recipes for each process step. The MES software can also provide functionality for the SPC (statistical process control) or provide an int…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. SOFTWARE, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export