CONCLUSION


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CONCLUSION
CONCLUSIONThe key to successful chemical and CMP slurry management is to understand the behavior of the materials and design around them to provide perfect chemical or slurry to the tool 24 hours a day, 365 days a year. With safety and process protection as driving design parameters, the growing world of wet processing will continue to rely on critical process systems that handle, purify, blend, and control high-purity chemicals and CMP slurries.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CONCLUSION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export