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SYSTEM PURITYSystem purity is critical as the levels of particles and ionic contamination in chemicals will have a direct effect on the process yields in the fab. Once ionic contamination is in the fluid stream, it cannot easily be removed. The only viable technique is preventing ionic contamination from entering the fluid stream. Process tools may or may not have filtration at the POU, so it is critical that the chemical dispense systems use the most effective particle removal technologies available.
Ionic Contamination Not every element in the periodic table is of concern when measuring for ionic contamination. Only those likely to be present after the chemical manufacturing process or tho…
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. SYSTEM PURITY, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export