CHEMICAL AND SLURRY HANDLING EQUIPMENT


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CHEMICAL AND SLURRY HANDLING EQUIPMENT
CHEMICAL AND SLURRY HANDLING EQUIPMENT
High-Purity Chemical Systems High-purity systems are used to move clear chemistries from the source container to the POUs. Clear chemistries include acids, bases, oxidizers, and solvents and exclude CMP slurries which contain suspended solids.
High-Purity Chemical System Conceptual Overview High-purity chemical dispense systems feature a wide variety of designs. Customers and suppliers each make a unique series of value judgments and corresponding design choices that optimize various attributes of the chemical system. The key design drivers are uptime…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CHEMICAL AND SLURRY HANDLING EQUIPMENT, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export