HISTORY OF CHEMICAL AND SLURRY HANDLING SYSTEMS


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HISTORY OF CHEMICAL AND SLURRY HANDLING SYSTEMS
HISTORY OF CHEMICAL AND SLURRY HANDLING SYSTEMSWhile liquid chemicals have been part of the semiconductor manufacturing process from the beginning, automated chemical handling systems were developed during the late 1980s and early 1990s to lower costs and improve the safety, purity, and repeatability of wet processing.
Cost The transition from manually handled small chemical packages to automated bulk systems provides direct cost benefits by reducing material and labor costs and by realizing the cost-of-ownership benefits in purchasing chemicals in bulk containers. Indirect cost benefits are derived from the increased safety and reproducibility benefits of aut…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. HISTORY OF CHEMICAL AND SLURRY HANDLING SYSTEMS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export