IMPORTANT TERMS


Please sign in to view the rest of this entry.

IMPORTANT TERMS
IMPORTANT TERMSIn this chapter, the following terminology is used: Point of use (POU)— a process tool or a portion of a process tool to which chemical or slurry is supplied Equipment— typically one physical cabinet with a specific task such as blending, pumping, filtering, or a combination of tasks Equipment controller— an electrical subsystem that manages the operational and safety-related tasks of a given piece of equipment Distribution system— the …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. IMPORTANT TERMS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export