INTRODUCTION


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INTRODUCTION
INTRODUCTIONProcess tools drive the semiconductor manufacturing process by managing a complex set of chemical reactions. A process tool's lifeblood consists of raw materials that include bulk inert gases, toxic and reactive gases, ultrapure water, process chemicals, and chemical mechanical polishing (CMP) slurries. The systems that generate, handle, purify, and/or measure each of these five classes of materials are typically designed and operated by a fab's facility management team and are referred to as "critical process systems." Each critical process system is comprised of standard products from specialized suppliers that are engineered and assembled into site-specific systems to meet the unique needs of the customer's physical facility and process requirements. As such, selecting and managing a cri…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export