REFERENCES


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REFERENCES
REFERENCES T. Mizuno, A. Namiki, and S. Tsuzuki, "A Novel Filter Rating Using Less Than 30 nm Gold Nanoparticle and Protective Ligand," IEEE Transactions on Semiconductor Manufacturing, Vol. 22, No. 4, Nov. 2009. G. Van Schooneveld and D. Grant, "Technique for Measuring the Particle Retention of Liquid Filters to 10 nm," AFS Spring Conference, Bloomington, MN, 2013. T. Umeda, T. Mizuno, S. Tsuzuki, and T. Numaguchi, "New Filter Rating Method in Practice for Sub 30 nm Lithography Filter," Proceedings of SPIE, Vol. 7639, 2010. S. Madanshetty, "Apparatu…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export