USE OF FILTRATION AS A DEFECT ANALYSIS TOOL


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USE OF FILTRATION AS A DEFECT ANALYSIS TOOL
USE OF FILTRATION AS A DEFECT ANALYSIS TOOLBecause filters capture contamination and concentrate this contamination with use, they provide a unique opportunity to concentrate and isolate contamination that may be leading to defects on devices.There have been many instances where a factory has a defect excursion, and it is difficult to isolate the cause. Analyses of fluids sometimes do not indicate the potential contaminant due to low concentrations, or the fluid stream has diluted the contaminant. By evaluating a filter that has been in service during the defect increase, it is possible to determine possible contaminants. Materials suppliers investigating a particular lot of material, by evaluating the bulk filters used prior to bottling, have…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. USE OF FILTRATION AS A DEFECT ANALYSIS TOOL, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export