ULTRAPURE WATER FILTRATION


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ULTRAPURE WATER FILTRATION
ULTRAPURE WATER FILTRATIONThe structure and ratings of microfilters for ultrapure water is essentially the same as that for chemical filters, with different materials of construction typically used. For UPW, these filters will have hydrophilic surfaces, either natively, such as nylon (type 6,6) or surface modified, such as hydrophilic PTFE, or PAS. The microfilters can be used for point of distribution (POD), point of use (POU), or on the main loop. Cleanliness is critical in terms of particles, resistivity rinse-up, total oxidizable carbon (TOC), metals, and anions. For POU applications, flow is also critical as space constraints often limit available space for filter installation.As UPW systems typically are extremely clean, filtration ratings used for UPW h…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ULTRAPURE WATER FILTRATION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export