REFERENCES


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REFERENCES
REFERENCES W. Kern and D. Puotinen, "Cleaning Solutions Based on Hydrogen Peroxide for Use in Silicon Semiconductor Technology," RCA Review, 31: 187–206, 1970. NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities, 2015 edition. Hazard Communication, Hazard Classification Guidance for Manufacturers, Importers and Employers. OSHA 3844-02-2016 (2016). Retrieved from https://www.osha.gov/Publications/OSHA3844.pdf. OSHA Quick Card (2013).…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export