CONCLUSION


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CONCLUSION
CONCLUSIONWet chemical processes are an integral component in the manufacture of semiconductor devices, with the most prevalent process areas being cleaning, etching, lithography, and CMP applications. As processes have evolved, the mixtures and formulations have advanced to meet the unique process demands. While it is critical to protect the process, it is equally important to protect personnel, the facility, and the environment. Engineering controls and design considerations for handling and validating chemicals and slurries provide a mechanism for both a high-yield and safe facility.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CONCLUSION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export