ABATEMENT


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ABATEMENT
ABATEMENTThe handling of effluent streams is a key component in the handling of the process chemicals. As Table 33.1 highlighted some of the various hazards of some of the common process chemicals, engineering solutions are crucial to limit the exposure to the chemicals, or the products of the chemical reactions, to the operators or the general release into the environment. Chemical rooms and process tools are connected to scrubbed exhaust systems for neutralization of the chemicals via the facilities of various neutralization systems. Where scrubbed exhaust is not a suitable solution (e.g., flammable solvents), exhaust streams are connected to local abatement systems. Process chemicals that cannot be neutralized on-site often…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ABATEMENT, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export