ANALYTICAL VALIDATION


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ANALYTICAL VALIDATION
ANALYTICAL VALIDATIONAnalytical validation services are important to the manufacturing process as the information obtained can protect the manufacturing process from potential deviations in terms of metals, particulates or assay control for incoming material. Statistical control charts are extensively used to monitor process steps and any potential changes that may be encountered. Certificates of analysis from chemical suppliers are an important part of the supply chain as they provide information regarding control and specification limits. Ultimately, the information can be used to build a library based on key metrics and be transferred to process window changes based on potential lot-to-lot variability. One such metric is assay as there are numerous process steps in which etch rates or deve…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ANALYTICAL VALIDATION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export