LOGISTICS


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LOGISTICS
LOGISTICSAs semiconductor facilities and processes become more complex, the supply chain and logistics of the manufacturing process become more complex. Process chemicals enter the fabrication facility in a variety of different-sized containers and suitable materials of construction. Some of the common supply formats include drums, totes, and sometimes chemicals are provided by tanker; each method drives the design of the chemical distribution system. With an increase in the number of patterning and CMP process steps to fabricate more intricate geometries, chemical consumption requirements also increase. Logistically, the method in which process chemicals enter the facility is ever increasing in importance. For example, as the volume needs for particular chemicals has increased into the thousands to tens…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. LOGISTICS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export