GENERAL HANDLING OF PROCESS CHEMICALS AND SLURRIES


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GENERAL HANDLING OF PROCESS CHEMICALS AND SLURRIES
GENERAL HANDLING OF PROCESS CHEMICALS AND SLURRIESWith a variety of different chemicals used in the manufacturing process, chemical properties are an important design consideration for the facility and its construction. A common example is housing and segregating chemicals that are deemed incompatible; therefore, it is necessary to segregate the chemicals based on their properties. One strategy that is commonly used is separate chemical rooms based on the chemical type. For example, acids, solvents, oxidizers, and bases are often stored and dispensed in separate chemical rooms; copper chemistries are isolated from other chemistries to prevent the possibility of cross-contamination. An example of room segregation is shown in
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. GENERAL HANDLING OF PROCESS CHEMICALS AND SLURRIES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export