PROCESS CHEMICALS USED IN THE SEMICONDUCTOR MANUFACTURING PROCESS


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PROCESS CHEMICALS USED IN THE SEMICONDUCTOR MANUFACTURING PROCESS
PROCESS CHEMICALS USED IN THE SEMICONDUCTOR MANUFACTURING PROCESSA variety of chemicals are used to aid different process steps that have been described in detail in earlier chapters of this handbook. The fundamental sequence for manufacturing semiconductor devices is a multifaceted process based around the basic premises of cleaning, patterning, etching, material deposition via a variety of mechanisms or implantation, planarization, and repeating all or a subset of these fundamental steps in order to build the desired design. Common chemicals used in the semiconductor manufacturing process are shown in Table 33.2. To list every process chemical would be an enormous undert…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. PROCESS CHEMICALS USED IN THE SEMICONDUCTOR MANUFACTURING PROCESS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export