IMPORTANT CHEMICAL HAZARD TERMINOLOGY AND SYMBOLS


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IMPORTANT CHEMICAL HAZARD TERMINOLOGY AND SYMBOLS
IMPORTANT CHEMICAL HAZARD TERMINOLOGY AND SYMBOLSThe chemicals used in semiconductor manufacturing vary in the degree of risk that they present to the operator as well as the facility under normal or emergency conditions. Some of the common hazards that can be found in a semiconductor processing location have been specifically identified and defined in NFPA 318, Standard for the Protection of Semiconductor Fabrication Facilities.2 If not referenced specifically, the terms used in this chapter are defined by their normally accepted meanings as defined in Merriam-Webster's Collegiate Dictionary, 12t…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. IMPORTANT CHEMICAL HAZARD TERMINOLOGY AND SYMBOLS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export