INTRODUCTION


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INTRODUCTION
INTRODUCTIONThe semiconductor industry has evolved with the advancement of technology and the exponential increases in transistor packing density and reduction of critical feature sizes. As the scale of feature sizes have decreased, the volume of chemicals has increased due to the additional process steps that are involved to manufacture features of increasing complexity. With the demand for increased volumes of chemicals supplied to the processing tools, methods for bulk chemical handling have been incorporated into the facility design. As the number of process steps has increased, so has the criticality of each step in the manufacturing process to prevent any excursion from altering device yield.One of the most significant process advancements is the use and development o…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export