ACKNOWLEDGMENTS


Please sign in to view the rest of this entry.

ACKNOWLEDGMENTS
ACKNOWLEDGMENTSThe author appreciates detailed peer review provided by Dan Wilcox, UPW technology veteran with many years of experience in water and wastewater treatment applications in semiconductor industry.This chapter incorporates collective knowledge and development of the group of experts involved in the UPW technology roadmap development for semiconductor industry as well as in the development of the UPW system related standards and guidelines via SEMI (Semiconductor International) organization.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ACKNOWLEDGMENTS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export