RECOMMENDATIONS FOR REACHING HIGH-QUALITY UPW


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RECOMMENDATIONS FOR REACHING HIGH-QUALITY UPW
RECOMMENDATIONS FOR REACHING HIGH-QUALITY UPWUPW technology has reached its maturity over several past decades of the UPW technology optimization. New treatment systems and combinations have been developed and optimized, while others removed or replaced. The industry consolidation happened for both semiconductor companies as well as for the supply chain. UPW technology suppliers are capable of delivering efficient and reliable UPW systems. At the same time there are specific areas that require considerations when building new or upgrading existing UPW system: Material of construction in the polish and distribution loops: It is important to not only specify high-purity materials for these applicati…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. RECOMMENDATIONS FOR REACHING HIGH-QUALITY UPW, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export