UPW CHALLENGES OF THE SEMICONDUCTOR INDUSTRY


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UPW CHALLENGES OF THE SEMICONDUCTOR INDUSTRY
UPW CHALLENGES OF THE SEMICONDUCTOR INDUSTRY
UPW Quality The advanced semiconductor technology nodes of the future will require the most demanding UPW specifications.
Particles The biggest challenge for UPW is particle control. This is due to the inability to detect "killer" particles and the concern that the final filters may be unable to remove those particles efficiently (Tables 32.3 and 32.4).
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. UPW CHALLENGES OF THE SEMICONDUCTOR INDUSTRY, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export