ANALYTICAL METHODS AND TECHNIQUES


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ANALYTICAL METHODS AND TECHNIQUES
ANALYTICAL METHODS AND TECHNIQUES
Online Analytical Measurements
Conductivity/Resistivity In pure water systems, electrolytic conductivity or resistivity measurement is the most common indicator of ionic contamination. The same basic measurement is read out in either conductivity units of microsiemens per centimeter (μS/cm), typical of the pharmaceutical and power industries or in resistivity units of megohm-centimeters (MΩ·cm) used in the microelectronics industries. These units are reciprocals of each other. Absolutely pure water has a conductivity of 0.05501 μS/cm and a resistivity of 18.18 MΩ·cm at 25°C, the most comm…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ANALYTICAL METHODS AND TECHNIQUES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export