UPW DISTRIBUTION SYSTEM UPW DISTRIBUTION SYSTEMThe distribution system is also a part of the polish loop. Its design is critical for the UPW quality at the point-of-use (POU) and may play major role in the cost of the overall system (Fig. 32.3).
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. UPW DISTRIBUTION SYSTEM, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering