UPW PRODUCTION


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UPW PRODUCTION
UPW PRODUCTION
Pretreatment Pretreatment is responsible for removal of majority of the feed water impurities. Most of the maintenance and operation activities are focused on this portion of the treatment system. The initial steps of pretreatment address removal of suspended solids and chlorine, as well as the temperature control, which are important for successful and reliable operation of the subsequent deionization processes. In addition, the degree of filtration upstream of these processes will be dictated by the level of suspended solids, turbidity, and organics present in the source water. The common types of filtration choices are depth filters (i.e., multimedia, sand, activated carbo…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. UPW PRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export