INTRODUCTION


Please sign in to view the rest of this entry.

INTRODUCTION
INTRODUCTION
UPW System Ultrapure water (also UPW or high-purity water) is water that is purified to exceptionally stringent quality specifications. Ultrapure water is a commonly used term in the semiconductor industry to emphasize the fact that the water is treated to the highest levels of purity for all contaminant types, including organic and inorganic compounds, dissolved and particulate matter, volatile and nonvolatile, reactive and inert, hydrophilic and hydrophobic, and dissolved gases. UPW, however, is very different from another commonly used term, deionized (DI) water. Figure 32.1 illustrates a typical UPW syst…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export