OPERATION AND MAINTENANCE


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OPERATION AND MAINTENANCE
OPERATION AND MAINTENANCEDesigning, installing, and turning over a high-purity gas system to a semiconductor manufacturer marks the end of one chapter (~2 to 3 years) and initializes another, more critical, chapter that will remain in play for the lifetime of the facility. If irregularities or errors occur during the course of the initial installation they can often be remedied with minimal impact to schedule and cost. If errors occur or contamination is introduced into an operating facility producing product, the consequences can be catastrophic resulting in millions of dollars of damaged wafers and millions of dollars of missed opportunity revenue. For these reasons, comprehensive and diligent control and management of the operation and maintenance of high-purity bulk gas systems is cri…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. OPERATION AND MAINTENANCE, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export