TOOL HOOKUP


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TOOL HOOKUP
TOOL HOOKUPThis is the connection between the POC valve on the distribution submain or lateral and the tool inlet fitting. In between the two it is common to find a series of hookup components (sometimes called a "hookup stick") consisting of an isolation valve, sample valve, regulator, pressure gauge or transducer, and filter. Prefabricating, preconditioning, and pretesting these assemblies helps expedite the tool-hookup process.There are a variety of concepts that can be used for tool-hookup lines, and the two main methods are the use of isolation valves with purge port valves versus isolation valves with only a purge port (Fig. 31.10). These can be found at the POC valve and/or the internals of t…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. TOOL HOOKUP, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export