QUALIFICATION/COMMISSIONING


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QUALIFICATION/COMMISSIONING
QUALIFICATION/COMMISSIONINGAt the completion of the certification process, approval of all related documentation, and confirmation that all purity and performance criteria has been achieved for a specific system, then that system can be considered qualified for use. If the system has been certified with the product gas then it can be turned over to the end user.If the system will be used for a gas other than what was used in the certification process (i.e., He, H2, O2, and specialty gases), then it may be necessary to evacuate the system to remove the certification gas prior to introduction of the product gas. This decision depends on what impurities the end user considers as potentially damaging to the process.…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. QUALIFICATION/COMMISSIONING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export